![]() |
Volumn 104, Issue 25, 2014, Pages
|
Ultrafast dark-field surface inspection with hybrid-dispersion laser scanning
b
HITACHI LTD
(Japan)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ACCIDENT PREVENTION;
INSPECTION;
LIGHT EMITTING DIODES;
LITHIUM ALLOYS;
LITHIUM COMPOUNDS;
LITHIUM-ION BATTERIES;
MANUFACTURE;
ORGANIC LIGHT EMITTING DIODES (OLED);
SMARTPHONES;
SPEED;
CURRENT TECHNOLOGY;
HIGH-EFFICIENCY SOLAR CELLS;
INDUSTRIAL MANUFACTURING;
MANUFACTURING COST;
ORGANIC LIGHT EMITTING DIODE DISPLAY;
REAL-TIME IDENTIFICATION;
REALTIME INSPECTION;
SURFACE INSPECTION;
SURFACE DEFECTS;
|
EID: 84976591699
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/l.4885l47 Document Type: Article |
Times cited : (35)
|
References (19)
|