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Volumn 18, Issue 12, 1993, Pages 26-35

Stress-induced void formation in metal lines

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EID: 84976052809     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/S0883769400039051     Document Type: Article
Times cited : (29)

References (33)
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