BUBBLE AND CAVITY FORMATION IN ALUMINIUM-PLASMA SILICON NITRIDE STRUCTURES.

Volumn , Issue , 1986, Pages 165-172

  Peek, H L ^a   Wolters, R A M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON NITRIDE;

BUBBLE AND CAVITY FORMATION; PLASMA-DEPOSITED SILICON NITRIDE;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0022603195     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)