Optical surface profilometry of low reflectance materials - evaluation as a laser processing diagnostic

Laser Cleaning II

Volumn , Issue , 2007, Pages 271-289

  Kane, D M ^a   Joyce, A M ^a   Chater, R J ^b  

^a MACQUARIE UNIVERSITY   (Australia)

^b IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL RESEARCH; OPTICAL MATERIALS; PROFILOMETRY; QUALITY ASSURANCE; REFLECTION;

FEASIBILITY STUDIES; ITS APPLICATIONS; MANUFACTURING PROCESS; MATERIALS EVALUATION; OPTICAL SUBSTRATES; OPTICAL SURFACES; RESEARCH AND DEVELOPMENT; STYLUS PROFILOMETRY;

LASER MATERIALS PROCESSING;

EID: 84967540988     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1142/9789812706843_0015     Document Type: Chapter

References (7)

1. Kane, D. M., Halfpenny, D. R., (2000) Reduced threshold ultraviolet laser ablation of glass substrates with surface particle coverage: A mechanism for systematic surface laser damage, Journal of Applied Physics, Vol. 87, № 9, pp 4548-4552.
2. Wyant, J. C., Koliopoulos, C. L., Bhushan, B. and Basila, D., (1986) development of a three-dimensional noncontact digital optical profiler, J Tribology, Vol 108, pp 1-8.
3. Lamb, C., Zecchino, M., (1999) WYKO Surface Profilers Technical Reference Manual, Veeco Metrology Group, Version 2.1.1.
4. Kromasil website with the details of the SM: http://www.kromasil.com/products/products/kromasil/index.htm.
5. B S Luk’yanchuk, Z B Wang, Y Zhou, M H Hong, W D Song and T C Chong, Particle on asurface: about possible acoustic and plasmonic effects in dry laser cleaning, ch 3, this book.
6. Kim, S., Kim, G., (1999) Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry, Applied Optics, Vol. 38, № 28, pp 5968-5973.
7. Deck, L., de Groot, P., (1994) High-speed non-contact profiler based on scanning white-light interferometry, Applied Optics, Vol. 33, № 31, pp 7334-7338.