Mechanical testing of gold membranes on a MEMS device for drug delivery

2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Volumn , Issue , 2002, Pages 390-393

  Li, Yawen ^a   Shawgo, R S ^a   Langer, R ^a   Cima, M J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

bulge test; corrosion; mechanical properties; microfabrication

Indexed keywords

CORROSION; DRUG DOSAGE; GOLD; MECHANICAL PROPERTIES; MECHANICAL TESTING; MEMBRANES; MICROANALYSIS; MICROFABRICATION; NONDESTRUCTIVE EXAMINATION; PLASTIC DEFORMATION;

BULGE TESTS; CONVENTIONAL METHODS; DEVICE PERFORMANCE; DRUG DELIVERY DEVICES; ELECTROCHEMICAL DISSOLUTION; MICROFABRICATION PROCESS; NONDESTRUCTIVE METHODS; SILICON SUBSTRATES;

CONTROLLED DRUG DELIVERY;

EID: 84964587573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MMB.2002.1002353     Document Type: Conference Paper

References (8)

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