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Volumn , Issue , 2002, Pages
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An active head slider using a piezoelectric cantilever for in-situ flying-height control
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HITACHI LTD
(Japan)
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Author keywords
Hard Disks; Microactuators; Microelecto mechanical Devices; Piezoelectric Films
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Indexed keywords
BEARINGS (MACHINE PARTS);
MAGNETIC RECORDING;
MICROACTUATORS;
MICROMACHINING;
NANOCANTILEVERS;
PIEZOELECTRICITY;
ACTIVE-HEAD SLIDERS;
AIR BEARING SURFACE;
FLYING HEIGHT CONTROL;
MECHANICAL DEVICE;
MICROMACHINING PROCESS;
PIEZOELECTRIC CANTILEVERS;
PIEZOELECTRIC FILM;
PIEZOELECTRIC UNIMORPH;
HARD DISK STORAGE;
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EID: 84964519962
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/APMRC.2002.1037944 Document Type: Conference Paper |
Times cited : (3)
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References (4)
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