Determination of Young's modulus of bulk single crystal silicon by C-V measurement

Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

Volumn , Issue , 2002, Pages

  Li, Qinghua ^a   Lu, Yi ^a   Chen, Shixin ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; MAGNETIC RECORDING; SILICON WAFERS; SINGLE CRYSTALS;

BULK SINGLE CRYSTALS; C-V CURVE; C-V MEASUREMENT;

MONOCRYSTALLINE SILICON;

EID: 84964502616     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMRC.2002.1037702     Document Type: Conference Paper

References (2)

1. http://www.ime.a-star.edu.sg/mems/mems-index.asp
2. C. J. Wilson, and P. A. Beck, "Fracture testing of bulk silicon micro cantilever beams subjected to a side load," J. Microelectromechanical System, Vol. 5, No. 3, pp. 142-150, 1996.