Theory of high overtone bulk acoustic wave resonator as a gas sensor

13th International Conference on Microwaves, Radar and Wireless Communications, MIKON 2000

Volumn 2, Issue , 2000, Pages 469-472

  Mansfeld, G D ^a  

^a INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CHEMICAL SENSORS; GAS ABSORPTION; GAS DETECTORS; GAS SENSING ELECTRODES; OPTICAL RESONATORS; RADAR; RESONATORS; WIRELESS TELECOMMUNICATION SYSTEMS;

ACOUSTIC WAVELENGTH; FREQUENCY CHANGES; GAS-SENSITIVE LAYERS; HIGH OVERTONE BULK ACOUSTIC WAVE RESONATORS; INITIAL THICKNESS; ONE-DIMENSIONAL MODEL; SENSOR SENSITIVITY; THIN FILM TRANSDUCERS;

ACOUSTIC SPECTROSCOPY;

EID: 84963799616     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIKON.2000.913971     Document Type: Conference Paper

References (5)

1. V.V.Malov, Piezoresonance sensors. Moscow, "Energoatomizdat", 1989.
2. G.D.Mansfeld, BAW composite resonator spectroscopy,, 1994 Ultrasonics Symp. Proc., 655-658, Cannes, France.
3. G.D.Mansfeld, S.G.Alekseev, Theory and numerical analysis of bulk acoustic wave multilayer composite resonator structure. 1997 Ultrasonics Symp. Proc., pp.891-894, Canada.
4. S.G.Alekseev, S.V.Boritko, G.D. Mansfeld, Resonsnt nature of the sensitivity of gas analytical chemical sensors using a composite acoustic resonator. Tech.Phys.Letters, v.25, to be published.
5. Dorojkin L.M., Volkov V.V., Doroshenko V.S. et all. Sensors and actuators. 1997, v.B44, p.488.