Air damping of mechanical microbeam resonators with optical excitation and optical detection

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 61-62

  Chen, Hua ^a   Drilhole, D ^b   Robert, O ^a  

^a ESIEE PARIS   (France)

^b Division Optique   (France)

Author keywords

Air damping; effective viscosity; FEM simulation; Q factor; reflectometry; resonator

Indexed keywords

ATMOSPHERIC PRESSURE; COMPUTER SOFTWARE; DAMPING; MOEMS; OPTICAL DATA PROCESSING; PHOTOEXCITATION; Q FACTOR MEASUREMENT; RESONATORS;

AIR DAMPING; EFFECTIVE VISCOSITY; FEM SIMULATIONS; Q-FACTORS; REFLECTOMETRY;

FINITE ELEMENT METHOD;

EID: 84963777349     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031443     Document Type: Conference Paper

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