Calculation and accurate measurement of capacitance of electrically small axi-symmetric microstructures near a probe tip

61st ARFTG Conference Digest Spring 2003: Measurement Accuracy, ARFTG Spring 2003

Volumn , Issue , 2003, Pages 147-156

  Zhang, Tao ^a   Tabib Azar, M ^a,b  

^a Case Western Reserve University   (United States)

^b CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; MICROWAVE MEASUREMENT; PERMITTIVITY; RESONATORS; SCANNING PROBE MICROSCOPY; TOPOGRAPHY;

ACCURATE MEASUREMENT; CALIBRATION PROCEDURE; CAPACITANCE MATRIX; CLOSED FORM SOLUTIONS; CURRENT CONTINUITY; DIELECTRIC SUBSTRATES; MEASUREMENT APPARATUS; MICROSTRIP RESONATOR;

NUMERICAL METHODS;

EID: 84954207862     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTGS.2003.1216879     Document Type: Conference Paper

References (11)

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3. M. Tabib-Azar, D.-P. Su, A. Pohar, S. R. LeClair, and G. Ponchak, '0.4 μm spatial resolution with 1 GHz (λ= 30 cm) evanescent microwave probe', Rev. Sci. Instrum. Vol 70, 1725 ( 1999).
4. Tabib-Azar, M. et al., "Acousto-electromagnetic properties of human dentin." IEEE-EMBS Special Topic Issue on Microtechnologies in Medicine and Biology (Cat. No.02EX578) 2002 p.189-92
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6. M. Tabib-Azar, J. L. Katz, S. LeClair, "Evanescent Microwaves: A Novel, Super-resolution, Noncontact and Nondestructive Imaging Technique for Biological Applications." EEEE Trans. on Instrumentation and Measurement, pp. 1111-1118 ( 1999).
7. M. Tabib-Azar and S. R. LeClair, "Applications of Evanescent Microwave Probes in Gas and Chemical Sensors." Sensors and Actuators B 67, pp. 112-121 ( 2000).
8. M. Tabib-Azar, R. Ciocan, G. Ponchak and S. R. LeClair, "Transient Thermography Using Microwave Microscope," Review of Scientific Instruments, Vol. 70 ( 8), pp. 3387-3391 ( 1999).
9. M. Tabib-Azar and B. Sutapun, "Novel Hydrogen Sensors Using Evanescent Microwave Probes." Review of Scientific Instruments, Vol. 70 ( 9), pp. 3707-3714 ( 1999).
10. M. Tabib-Azar and D. Akinwande, "Real-Time Imaging of Semiconductor Space-Charge Regions Using High-Spatial Resolution Evanescent Microwave Microscope." Rev. of Scientific Instr. Vol. 71 ( 3), p. 1725-1730 ( 2000).
11. M. Sancho, J. L. Sebastian, S. Munoz, and J. M. Miranda, "Computational method in electrostatics based on Monte Carlo energy minimization." Proc. IEEE Science, Measurement and Technology, vol. 148. pp. 121-124, May 2001.