Thermal management of BioMEMS

InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITHERM

Volumn 2002-January, Issue , 2002, Pages 1025-1032

  Sadler, D J ^a   Changrani, R ^a   Roberts, P ^a   Chou, Chia Fu ^a   Zenhausern, F ^a  

^a MOTOROLA INC   (United States)

Author keywords

Air gaps; Biological control systems; Ceramics; Microfluidics; Nonhomogeneous media; Temperature control; Temperature measurement; Temperature sensors; Thermal management; Thermal sensors

Indexed keywords

AIR; CERAMIC MATERIALS; CERAMIC PRODUCTS; CLOSED LOOP CONTROL SYSTEMS; FINITE ELEMENT METHOD; FLOW OF FLUIDS; FLUIDIC DEVICES; MICROFLUIDICS; PALLADIUM; POLYMERASE CHAIN REACTION; SILVER; SURFACE MOUNT TECHNOLOGY; TEMPERATURE; TEMPERATURE MEASUREMENT; TEMPERATURE SENSORS; THERMAL VARIABLES CONTROL; THICK FILM DEVICES; THICK FILMS;

AIR-GAPS; BIOLOGICAL CONTROL SYSTEMS; CERAMICS; NONHOMOGENEOUS MEDIA; THERMAL SENSORS;

TEMPERATURE CONTROL;

EID: 84950143947     PISSN: 19363958     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ITHERM.2002.1012570     Document Type: Conference Paper

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