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Volumn 2000-January, Issue , 1999, Pages 75-79

Fabrication and modeling of a silicon micro calorimeter

Author keywords

Aluminum; Biomembranes; Chemical sensors; Chemistry; Delay; Fabrication; Prototypes; Rubber; Silicon; Temperature sensors

Indexed keywords

ALUMINUM; CALORIMETERS; CHEMICAL SENSORS; CHEMISTRY; FABRICATION; MICROELECTRONICS; RUBBER; SILICON; SURFACE CHEMISTRY; THERMOCOUPLES; THERMOPILES;

EID: 84949781436     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICM.2000.884809     Document Type: Conference Paper
Times cited : (1)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.