|
Volumn 2000-January, Issue , 1999, Pages 75-79
|
Fabrication and modeling of a silicon micro calorimeter
|
Author keywords
Aluminum; Biomembranes; Chemical sensors; Chemistry; Delay; Fabrication; Prototypes; Rubber; Silicon; Temperature sensors
|
Indexed keywords
ALUMINUM;
CALORIMETERS;
CHEMICAL SENSORS;
CHEMISTRY;
FABRICATION;
MICROELECTRONICS;
RUBBER;
SILICON;
SURFACE CHEMISTRY;
THERMOCOUPLES;
THERMOPILES;
APPLICATION REQUIREMENTS;
BIOMEMBRANES;
CONVECTION COEFFICIENTS;
DELAY;
ELECTRICAL EQUIVALENT CIRCUIT;
HIGH SURFACE-TO-VOLUME RATIO;
POST-PROCESSING TECHNIQUES;
PROTOTYPES;
TEMPERATURE SENSORS;
|
EID: 84949781436
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICM.2000.884809 Document Type: Conference Paper |
Times cited : (1)
|
References (9)
|