Digital Micromirror Device (DMD) hinge memory lifetime reliability modeling

IEEE International Reliability Physics Symposium Proceedings

Volumn 2002-January, Issue , 2002, Pages 118-121

  Sontheimer, A B ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

Acceleration; Electrodes; Fasteners; Life estimation; Life testing; Lifetime estimation; Micromirrors; Mirrors; Temperature; Torque

Indexed keywords

ACCELERATION; ELECTRODES; FAILURE ANALYSIS; FASTENERS; MIRRORS; OPTICAL TESTING; RELIABILITY; SEMICONDUCTOR DEVICE MANUFACTURE; TEMPERATURE; TORQUE;

DIGITAL MICRO-MIRROR DEVICE; FAILURE MODES AND MECHANISMS; LIFE ESTIMATION; LIFE-TESTING; LIFETIME ESTIMATION; LIFETIME RELIABILITY; MICRO MIRROR; SEMICONDUCTOR INDUSTRY;

FAILURE MODES;

EID: 84949199137     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2002.996622     Document Type: Conference Paper

References (4)

1. S.P. Overmann, "Thermal Design Considerations for Portable DLP™ Projectors", IMAP HD International Conference Proceedings, Santa Clara, CA April 2001, pp.125-130.
2. L.J. Hornbeck, "Digital Light Processing™ and MEMS: Timely Convergence for a Bright Future", Plenary Session, SPIE Micromachining and Microfabrication '95, Austin, TX, October 24, 1995, p. 2.
3. P.F. Van Kessel, L.J. Hornbeck, R.E. Meier, M.R. Douglass, "A MEMS-Based Projection Display", Proceedings of the IEEE, Vol. 86, No. 8, August 1998, pp. 1687-1704.
4. th Annual International Reliability Physics Symposium, Reno, Nevada, March 31, April 1-2, 1998, pp. 9-16.