Sol-gel preparation of thin films for integrated optics

IEEE International Symposium on Electron Devices for Microwave and Optoelectronic Applications

Volumn 2002-January, Issue , 2002, Pages 205-210

  Crisan, M ^a   Gartner, M ^a   Cristea, D ^b   Zaharescu, M ^a   Predoana, L ^a   Manea, E ^b   Caldararu, M ^c  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^c ECOSEN Ltd   (Romania)

Author keywords

Glass; Integrated optics; Mechanical factors; Optical films; Optical materials; Optical polymers; Optical sensors; Optical waveguides; Polymer films; Transistors

Indexed keywords

CERAMIC MATERIALS; ELECTRON DEVICES; FILM PREPARATION; FILMS; GLASS; INTEGRATED OPTICS; OPTICAL CORRELATION; OPTICAL GLASS; OPTICAL MATERIALS; OPTICAL PROPERTIES; OPTICAL SENSORS; OPTICAL WAVEGUIDES; ORGANOMETALLICS; POLYMER FILMS; SEMICONDUCTING FILMS; SILICON OXIDES; SOL-GEL PROCESS; TEMPERATURE; THIN FILMS; TRANSISTORS; WAVEGUIDES;

FABRICATION PROCESS; LOW TEMPERATURE POLYMERIZATION; MECHANICAL FACTORS; OPTICAL AND MECHANICAL PROPERTIES; OPTICAL APPLICATIONS; OPTICAL POLYMERS; SOL GEL PREPARATIONS; TRANSPARENT MATERIAL;

OPTICAL FILMS;

EID: 84949187230     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EDMO.2002.1174958     Document Type: Conference Paper

References (12)

1. M. Guglielmi, P. Colombo, L. Mancinelli Degli Esposti, G.C. Righini, S. Pelli, V. Rigato, J. Non-Cryst. Solids 147-148 (1992) 641.
2. M. Bahtat, J. Mugnier, C. Bovier, H. Roux, J. Serughetti, J. Non-Cryst. Solids 147-148 (1992) 123.
3. C. Stamm, W. Lukosz, Sensors and Actuators B-Chemical 11 (1993), 177.
4. R.R.A. Syms, A.S. Holmes, J. Non-Cryst. Solids 170 (1994) 223.
5. X. Orignac, H.C. Vasconcelos, Rui M. Almeida, J. Non-Cryst. Solids 217 (1997) 155.
6. G. Brusatin, M. Guglielmi, P. Innocenzi, A. Martucci, G.C. Battaglin, S. Pelli, G.C. Righini, J. Non-Cryst. Solids 220 (1997) 202
7. P. Innocenzi, A. Martucci, M. Guglielmi, L. Armelao, S, Pelli, G.C. Righini, G.C. Battaglin, J. Non-Cryst. Solids 259 (1999) 182.
8. A. Karthikeyan, Rui M. Almeida, J. Non-Cryst. Solids 274 (2000) 169.
9. C.M. Whang, S.S. Lim, Bulletin of the Korean Chemical Society 21 (2000) 1186.
10. M. Zaharescu, C. Pîrlog, M. Cri□an, M. Gartner, M. Sahini, A. Vasilescu, Rev. Roum. Chim. 37, 1 (1992) 173.
11. D.A.G. Bruggeman, Ann. Phys. (Leipzig), 24, (1935) 636.
12. M. Zaharescu, M. Cri□an, A. Jitianu, D. Cri□an, Chem. Bull. "POLITEHNICA" Univ. (Timi□oara) 44, 1 (1999)53.