A microfluidic system for the measurement of chemical concentration and density

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 300-303

  Sparks, D ^a   Smith, R ^a   Straayer, M ^a   Cripe, J ^a   Schneider, R ^a   Massoud Ansari, S ^a   Najafi, N ^a  

^a Integrated Sensing Systems Inc   (United States)

Author keywords

Chemicals; Density measurement; Fluid dynamics; Gravity; Microfluidics; Micromechanical devices; Signal resolution; Temperature control; Temperature sensors; Thermoelectricity

Indexed keywords

ACTUATORS; CHEMICALS; DENSITY MEASUREMENT (SPECIFIC GRAVITY); FLUID DYNAMICS; FLUIDIC DEVICES; GRAVITATION; MICROFLUIDICS; MICROSYSTEMS; SOLID-STATE SENSORS; TEMPERATURE CONTROL; TEMPERATURE SENSORS; THERMOELECTRICITY; TRANSDUCERS;

CHEMICAL CONCENTRATIONS; CONVENTIONAL SYSTEMS; DENSITY RESOLUTION; MICRO FLUIDIC SYSTEM; MICROMECHANICAL DEVICE; ON-CHIP TEMPERATURE; SIGNAL RESOLUTION; TEMPERATURE ACCURACIES;

DENSITY (SPECIFIC GRAVITY);

EID: 84944726633     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215312     Document Type: Conference Paper

References (6)

1. Y.Zhang, S.Tadigadapa and N.Najafi, "A micromachined Coriolis-force-based mass flowmeter for direct mass flow and fluid density measurements," Transducers'01, 2001, 1460.
2. H.Henmi, S.Shoji, Y.Shoji, K.Yoshimi and M. Esashi, "Vacuum packaging for microsensors by glass-silicon anodic bonding," Sensors and Actuators A, 43, 1994, 243.
3. D.Sparks, et al., "Chip-scale packaging of a gyroscope using wafer bonding," Sensors and Materials, Vol. 11, 1999, 197.
4. D. Sparks,et al., "Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder," J. Micromech.&Microengr., Vol.11, No.6, 2001, 630.
5. M.Esashi, et al."Vacuum-sealed silicon micromachined pressure sensors," Proc. IEEE, Vol. 86, No. 8, 1998, 1627.
6. H. Bettin and F.Spieweck, "Die dichte des wassers als funktion der temperatur nach einfurung der internationalen temperaturskala van 1990," PTB-Mitt. 100, p1990, 195.