Scaling of High-k dielectrics towards sub-1nm EOT

International Symposium on VLSI Technology, Systems, and Applications, Proceedings

Volumn 2003-January, Issue , 2003, Pages 247-250

  Heyns, M ^a   Beckx, S ^a   Bender, H ^a   Blomme, P ^a   Boullart, W ^a   Brijs, B ^a   Carter, R ^a   Caymax, M ^a   Claes, M ^a   Conard, T ^a   De Gendt, S ^a   Degraeve, R ^a   Delabie, A ^a   Deweerdt, W ^a   Groeseneken, G ^a   Henson, K ^a   Kauerauf, T ^a   Kubicek, S ^a   Lucci, L ^a   Lujan, G ^a   Mentens, J ^a   Pantisano, L ^a   Petry, J ^a   Richard, O ^a   Rohr, E ^a   Schram, T ^a   Vandervorst, W ^a   Van Doome, P ^a   Van Elshocht, S ^a   Westlinder, J ^a   Witters, T ^a   Zhao, C ^a   Cartier, E ^b   Chen, J ^b   Cosnier, V ^b   Green, M ^b   Jang, S E ^b   Kaushik, V ^b   Kerber, A ^b   Kluth, J ^b   Lin, S ^b   Tsai, W ^b   Young, E ^b   Manabe, Y ^c   Shimamoto, Y ^c   Bajolet, P ^d   De Witte, H ^d   Maes, J W ^d   Date, L ^e   Pique, D ^e   Coenegrachts, B ^f   Vertommen, J ^f   Passefort, S ^g   more..

^a IMEC   (Belgium)

^b IMEC   (Belgium)

^c IMEC   (Belgium)

^d IMEC   (Belgium)

^e IMEC   (Belgium)

^f IMEC   (Belgium)

^g KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; HAFNIUM OXIDES; INTERFACES (MATERIALS); SILICATES; THERMODYNAMIC STABILITY;

DEPOSITION CONDITIONS; ELECTRICAL INSTABILITY; EQUIVALENT OXIDE THICKNESS; HIGH TEMPERATURE STABILITY; HIGH-K DIELECTRIC LAYERS; INTERFACE ENGINEERING; SURFACE PREPARATION METHODS; TRANSISTOR STRUCTURE;

DIELECTRIC MATERIALS;

EID: 84944687241     PISSN: 19308868     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VTSA.2003.1252599     Document Type: Conference Paper

References (13)

1. W. Vandervorst, H. Bender, T. Conard, O. Richard, C. Zhao, B. Brijs, M. Caymax, S. De Gendt, V. Cosnier, J. Chen, J. Kluth, E. Cartier, M. Green, to be published in Proc. MRS 2002 Fall Meeting, Dec.2-6, 2002, Boston, USA
2. A. Delabie, M. Caymax, B. Brijs, T. Conard, S. De Gendt, M. Heyns, W. Vandervorst, C. Zhao, J. W. Maes, M. Green, J. Kluth and W, Tsai, to be published in Proc. MRS 2002 Fall Meeting, Dec.2-6, 2002, Boston, USA
3. S. Van Elshocht, M. Caymax, S. De Gendt, T. Conard, J. Pétry, M. Claes, T. Witters, C. Zhao, B. Brijs, O. Richard, H. Bender, W. Vandervorst, R. Carter, J. Kluth, L. Daté, D. Pique and M. M. Heyns, to be published in Proc. MRS 2002 Fall Meeting, Dec.2-6, 2002, Boston, USA
4. C. Zhao, V. Cosnier, P. J. Chen, O. Richard, G. Roebben, J. Maes, S. Van Elshocht, H. Bender, E, Young, O. Van Der Biest, M. Caymax, W. Vandervorst, S. De Gendt and M. Heyns, to be published in Proc. MRS 2002 Fall Meeting, Dec.2-6, 2002, Boston, USA
5. V. S. Kaushik, S. DeGendt, J. Kluth, R. Carter, L. Pantisano, M. Green, E. Young and M. Heyns, to be published in Proc. MRS 2002 Fall Meeting, Dec.2-6, 2002, Boston, USA
6. S. Kubicek, R. J. Carter, V. Kaushik, G. S. Lujan, E. Cartier, W. K. Henson, A. Kerber, L. Pantisano, S. Beckx, P. Jaenen, S. DeGendt, M. Heyns and K. De Meyer, to be published
7. R. J. Carter, S. Kubicek, E. Cartier, G. S. Lujan, A. Kerber, V. Kaushik, P. J. Chen, S. DeGendt and M. Heyns, to be presented at SISC 2002 conference, Dec. 5-7, 2002, San Diego, USA
8. S. Saito, Y. Shimamoto, K. Torii, Y. Manabe, M. Caymax, J. W. Maes, M. Hiratani and S. Kimura, proceedings SSDM 2002 Conference, Sept. 17-19, 2002, Nagoya, Japan
9. A. Kerber, E. Cartier, L. Pantisano, R. Degraeve, Y. Kim, A. Hou, G. Groeseneken, H. E. Maes and U. Schwalke, to be presented at SISC 2002 conference, Dec. 5-7, 2002, San Diego, USA
10. A. Kerber, E. Cartier, R. Degraeve, Ph. Roussel, L. Pantisano, T. Kauerauf, G. Groeseneken, S. De Gendt and M. Heyns, to be published in Proceedings WoDIM 2002, Nov. 18-20, 2002, Grenoble, France, Edited by IMEP, Grenoble, France
11. A. Kerber, E. Cartier, R. Degraeve, L. Pantisano, Ph. Roussel and G. Groeseneken, VLSI Technology Symposium, p. 76, 2002
12. J. Westlinder, T. Schram, L. Pantisano, E. Cartier, A. Kerber, G. S. Lujan and G. Groeseneken, to be presented at SISC 2002 conference, Dec. 5-7, 2002, San Diego, USA
13. T. Schram, G. S. Lujan, R. J. P. Lander, J. Vertommen, S. Lee, J-F. De Mameffe, W. Deweerdt, W. Boullart, S. Van Elshocht, R. Carter, S. Kubicek, K. Demeyer, K. Maex, S. De Gendt and M. Heyns, to be published