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Volumn , Issue , 2003, Pages 292-296
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Finite element simulation and theoretical analysis of microelectromechanical system relays
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Author keywords
Analytical models; Coils; Electromagnetic forces; Finite element methods; Magnetic analysis; Magnetic films; Microelectromechanical systems; Micromechanical devices; Microrelays; Relays
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Indexed keywords
ANALYTICAL MODELS;
ELECTRIC RELAYS;
ELECTROMECHANICAL DEVICES;
MAGNETIC DEVICES;
MAGNETIC FILMS;
MAGNETISM;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROMECHANICS;
COILS;
ELECTROMAGNETIC FORCES;
MAGNETIC ANALYSIS;
MICROMECHANICAL DEVICE;
MICRORELAYS;
RELAYS;
FINITE ELEMENT METHOD;
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EID: 84943751661
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICMENS.2003.1222012 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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