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Volumn 107, Issue 3, 2015, Pages
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Wafer-scale synthesis of multi-layer graphene by high-temperature carbon ion implantation
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CHEMICAL ACTIVATION;
GRAPHENE;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
HONEYCOMB STRUCTURES;
ION IMPLANTATION;
IONS;
MICROELECTRONICS;
NICKEL;
SILICON WAFERS;
TRANSMISSION ELECTRON MICROSCOPY;
WAFER BONDING;
ACTIVATION ANNEALING;
CARBON ION IMPLANTATION;
CARBON IONS;
HIGH QUALITY;
HIGH TEMPERATURE;
LARGE-AREA GRAPHENE;
MICRO RAMAN SPECTROSCOPY;
POST-IMPLANTATION;
CARBON FILMS;
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EID: 84937501318
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.4926605 Document Type: Article |
Times cited : (33)
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References (16)
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