Miniaturized particulate matter sensor for portable air quality monitoring devices

Proceedings of IEEE Sensors

Volumn 2014-December, Issue December, 2014, Pages 2151-2154

  Li, X ^a   Iervolino, E ^a,b   Santagata, F ^a,b   Wei, J ^a,b   Yuan, C A ^c,d   Sarro, P M ^a   Zhang, G Q ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b State Key Laboratory of Solid State Lighting   (China)

^c INSTITUTE OF SEMICONDUCTORS   (China)

^d State Key Laboratory of Solid State Lighting   (China)

Author keywords

Air quality sensor; Light scattering; MEMS; PM 2.5

Indexed keywords

AIR QUALITY; LIGHT SCATTERING; MEMS; PARTICLES (PARTICULATE MATTER); PHOTODIODES; TOBACCO;

AIR QUALITY MONITORING; FABRICATION PROCESS; LIGHT SCATTERED; MICRO-MACHINED; PARTICULATE MATTER; PORTABLE DEVICE; QUALITY DETECTION; TOBACCO SMOKE;

SMOKE;

EID: 84931040425     PISSN: 19300395     EISSN: 21689229     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2014.6985464     Document Type: Conference Paper

References (7)

1. U.S. Environmental Protection Agency, "Particulate Matter." [Online]. Available: http://www.epa.gov/airquality/particlepollution/index.html. [Accessed: 08-Jul-2014]
2. U.S. Environmental Protection Agency, Ed., Guidance for using continuous monitors in PM25 monitoring networks, no. May. DIANE Publishing, 1998, pp. 3-36.
3. H. Lim, D. Park, J. Maeng, J. Hwang, and Y. J. Kim, "MEMS Based Integrated Particle Detection Chip for Real Time Environmental Monitoring," in 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, no. January, pp. 62-65.
4. J. P. Black, A. Elium, R. M. White, M. G. Apte, L. A. Gundel, and R. Cambie, "MEMS-Enabled Miniaturized Particulate Matter Monitor Employing 1. 6 GHz Aluminum Nitride Thin-Film Bulk Acoustic Wave Resonator (FBAR ) and Thermophoretic Precipitator," vol. 4, no. c, pp. 3-6, 2000.
5. I. Paprotny, F. Doering, P. A. Solomon, R. M. White, and L. A. Gundel, "Microfabricated air-microfluidic sensor for personal monitoring of airborne particulate matter: Design, fabrication, and experimental results," Sensors Actuators A Phys., vol. 201, pp. 506-516, Oct. 2013.
6. B. Giechaskiel, M. Maricq, L. Ntziachristos, C. Dardiotis, X. Wang, H. Axmann, A. Bergmann, and W. Schindler, "Review of motor vehicle particulate emissions sampling and measurement: From smoke and filter mass to particle number," J. Aerosol Sci., vol. 67, pp. 48-86, Jan. 2014.
7. M. H. Becquemin, J. F. Bertholon, M. Attoui, F. Roy, M. Roy, and B. Dautzenberg, "Particle size in the smoke produced by six different types of cigarette," Rev. Mal. Respir., vol. 24, pp. 845-852 2007