Linearity of piezoresistive nano-gauges for MEMS sensors

Procedia Engineering

Volumn 87, Issue , 2014, Pages 1469-1472

  Langfelder, G ^a   Dellea, S ^a   Aresi, N ^a   Longoni, A ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Crystalline silicon; Nems; Piezoresistive effect; Surface micromachining

Indexed keywords

CAPACITIVE SENSORS; CRYSTALLINE MATERIALS; GAGES; NEMS; SURFACE MICROMACHINING; TRANSDUCERS;

BUCKLING EFFECTS; CRYSTALLINE SILICONS; LINEAR RANGE; PIEZO-RESISTIVE; PIEZORESISTIVE EFFECTS; PIEZORESISTIVE SENSING; RESPONSE LINEARITY; TEST STRUCTURE;

NANOSENSORS;

EID: 84923350339     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2014.11.727     Document Type: Conference Paper

References (5)

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3. G. Langfelder, A. Longoni, and F. Zaraga, Monitoring fatigue damage growth in polysilicon microstructures under different loading conditions, Sens. Actuators A, Phys., vol. 159, no. 2 (2010) 233-240.
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