Big data predictive analtyics for proactive semiconductor equipment maintenance

Proceedings - 2014 IEEE International Conference on Big Data, IEEE Big Data 2014

Volumn , Issue , 2014, Pages 893-902

  Munirathinam, Sathyan ^a   Ramadoss, B ^b  

^a MICRON TECHNOLOGY INC   (United States)

^b NATIONAL INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Big Data; Equipment; OEE; Predictive Analytics (PA); Semiconductor

Indexed keywords

MAINTENANCE; PREDICTIVE ANALYTICS; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE;

CHIP PROCESSING; DATA VOLUME; EQUIPMENT MAINTENANCE; MANUFACTURING INDUSTRIES; MANUFACTURING IS; OVERALL EQUIPMENT EFFECTIVENESS; PREDICTIVE ANALYTIC; SEMICONDUCTOR CHIPS; SEMICONDUCTOR EQUIPMENT; SEMICONDUCTOR MANUFACTURING;

BIG DATA;

EID: 84921749934     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/BigData.2014.7004320     Document Type: Conference Paper

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