Scalable fabrication of SnO 2 thin films sensitized with CuO islands for enhanced H 2 S gas sensing performance

Applied Surface Science

Volumn 324, Issue , 2015, Pages 280-285

  Van Toan, Nguyen ^a   Chien, Nguyen Viet ^a   Van Duy, Nguyen ^a   Vuong, Dang Duc ^b   Lam, Nguyen Huu ^b   Hoa, Nguyen Duc ^a   Van Hieu, Nguyen ^a   Chien, Nguyen Duc ^a,b  

^a HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

^b HANOI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Viet Nam)

Author keywords

CuO; H 2 S gas sensor; Reactive sputtering; SnO 2; Wafer scale fabrication

Indexed keywords

COPPER OXIDES; FABRICATION; GAS DETECTORS; GASES; MICROELECTRONICS; REACTIVE SPUTTERING; SEMICONDUCTOR JUNCTIONS; WSI CIRCUITS;

ENVIRONMENTAL POLLUTANTS; H2S GAS SENSORS; MICROELECTRONIC TECHNOLOGIES; OPERATING TEMPERATURE; SENSING CHARACTERISTICS; SENSITIZING EFFECTS; SNO2; WAFER SCALE FABRICATION;

THIN FILMS;

EID: 84920694299     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.10.134     Document Type: Article

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