Studies on atomic layer deposition of IRMOF-8 thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 33, Issue 1, 2015, Pages

  Salmi, Leo D ^a   Heikkilä, Mikko J ^a   Vehkamäki, Marko ^a   Puukilainen, Esa ^a   Ritala, Mikko ^a   Sajavaara, Timo ^b  

^a UNIVERSITY OF HELSINKI   (Finland)

^b UNIVERSITY OF JYVÄSKYLÄ   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ATOMIC LAYER DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; FIELD EMISSION MICROSCOPES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LOADING; PALLADIUM; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION; X RAY SPECTROSCOPY; ZINC COMPOUNDS;

ELASTIC RECOIL DETECTION ANALYSIS; ENERGY DISPERSIVE X-RAY SPECTROSCOPY; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GRAZING INCIDENCE X-RAY DIFFRACTION; HIGH-TEMPERATURE X-RAY DIFFRACTION; LARGE UNIT CELL; ROOM TEMPERATURE; TIME OF FLIGHT;

DEPOSITION;

EID: 84910668031     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4901455     Document Type: Article

References (29)

1. M. Eddaoudi, J. Kim, N. Rosi, D. Vodak, J. Wachter, M. O'Keeffe, and O. M. Yaghi, Science 295, 469 (2002).
2. N. L. Rosi, J. Eckert, M. Eddaoudi, D. T. Vodak, J. Kim, M. O'Keeffe, and O. M. Yaghi, Science 300, 1127 (2003).
3. S. Hermes, M. K. Schroter, R. Schmid, L. Khodeir, M. Muhler, A. Tissler, R. W. Fischer, and R. A. Fischer, Angew. Chem., Int. Ed. 44, 6237 (2005).
4. P. Horcajada, C. Serre, G. Maurin, N. A. Ramsahye, F. Balas, M. Vallet-Regi, M. Sebban, F. Taulelle, and G. Ferey, J. Am. Chem. Soc. 130, 6774 (2008).
5. Y. S. Li, F. Y. Liang, H. G. Bux, W. S. Yang, and J. Caro, J. Membr. Sci. 354, 48 (2010).
6. G. Lu and J. T. Hupp, J. Am. Chem. Soc. 132, 7832 (2010).
7. H. Fanø Clausen, R. Damgaard Poulsen, A. D. Bond, M.-A. S. Chevalier, and B. Brummerstedt Iversen, J. Solid State Chem. 178, 3342 (2005).
8. Y. Yoo and H. K. Jeong, Chem. Commun. 21, 2441 (2008).
9. Y. Yoo, Z. P. Lai, and H. K. Jeong, Microporous Mesoporous Mater. 123, 100 (2009).
10. P. Horcajada, C. Serre, D. Grosso, C. Boissiere, S. Perruchas, C. Sanchez, and G. Ferey, Adv. Mater. 21, 1931 (2009).
11. U. Müller, H. Pütter, M. Hesse, and H. Wessel, WO2005/049892 A1 (2 June 2005).
12. U. Müller, H. Pütter, M. Hesse, M. Schubert, H. Wessel, J. Huff, and M. Guzmann, US2011/105776 A1 (5 May 2011).
13. O. Shekhah et al., J. Am. Chem. Soc. 129, 15118 (2007).
14. M. Ritala and J. Niinistö, Chemical Vapour Deposition: Precursors, Processes and Applications, edited by A. C. Jones and M. L. Hitchman (The Royal Society of Chemistry, Cambridge, U.K., 2009), pp. 158-206.
15. M. Putkonen, J. Harjuoja, T. Sajavaara, and L. Niinistö, J. Mater. Chem. 17, 664 (2007).
16. T. Yoshimura, S. Tasuura, and W. Sotoyama, Appl. Phys. Lett. 59, 482 (1991).
17. H. I. Shao, S. Umemoto, T. Kikutani, and N. Okui, Polymer 38, 459 (1997).
18. A. A. Dameron, D. Saghete, B. B. Burton, S. D. Davidson, A. S. Cavanagh, J. A. Bertand, and S. M. George, Chem. Mater. 20, 3315 (2008).
19. O. Nilsen, K. B. Klepper, H. Ø. Nielsen, and H. Fjellva˚g, ECS Trans. 16, 3 (2008).
20. Q. Peng, B. Gong, R. M. VanGundy, and G. N. Parsons, Chem. Mater. 21, 820 (2009).
21. L. D. Salmi, E. Puukilainen, M. Vehkamäki, M. J. Heikkilä, and M. Ritala, Chem. Vap. Deposition 15, 221 (2009).
22. L. D. Salmi, M. J. Heikkilä, E. Puukilainen, T. Sajavaara, D. Grosso, and M. Ritala, Microporous Mesoporous Mater. 182, 147 (2013).
23. M. Ylilammi and T. Ranta-aho, Thin Solid Films 232, 56 (1993).
24. K. Uemura, R. Matsuda, and S. Kitagawa, J. Solid State Chem. 178, 2420 (2005).
25. L. T. L. Nguyen, C. V. Nguyen, G. H. Dang, K. K. A. Le, and N. T. S. Phan, J. Mol. Catal. A: Chem. 349, 28 (2011).
26. C.-Y. Wang, C.-S. Tsao, M.-S. Yu, P.-Y. Liao, T.-Y. Chung, H.-C. Wu, M. A. Miller, and Y.-R. Tzeng, J. Alloys Compd. 492, 88 (2010).
27. S. Hermes, F. Schröder, S. Amirjalayer, R. Schmid, and R. A. Fischer, J. Mater. Chem. 16, 2464 (2006).
28. D. Esken, X. Zhang, O. I. Lebedev, F. Schröder, and R. A. Fischer, J. Mater. Chem. 19, 1314 (2009).
29. S. Hermes, D. Zacher, A. Baunemann, C. Wöll, and R. A. Fischer, Chem. Mater. 19, 2168 (2007).