Bandwidth and sensitivity optimization in CMUTs for airborne applications

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2014, Pages 166-169

  Apte, Nikhil ^a   Park, Kwan Kyu ^b   Nikoozadeh, Amin ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

^b Hanyang University   (South Korea)

Author keywords

squeeze film damping; varying pressure; vented CMUT

Indexed keywords

BANDWIDTH; DAMPING; FAILURE (MECHANICAL); FINITE ELEMENT METHOD;

AIRBORNE APPLICATIONS; AMBIENT PRESSURES; DIFFERENTIAL PRESSURES; MECHANICAL FAILURES; SENSITIVITY OPTIMIZATION; SQUEEZE FILM EFFECTS; SQUEEZE-FILM DAMPING; VENTED CMUT;

SQUEEZE FILMS;

EID: 84910088686     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2014.0042     Document Type: Conference Paper

References (5)

1. M. N. Senlik, S. Olcum, H Köymen and A. Atalar, "Bandwidth, Power and Noise Considerations in Airborne cMUTs," in Proc. IEEE International Ultrasonics Symposium 2009, pp. 438-441
2. M. S. Beck, "Correlation in instruments: cross correlation flowmeters," in J. Phys. E: Sci. Instrum., Vol. 14, 1981, pp. 7-19
3. N. Apte, K. K. Park, and B. T. Khuri-Yakub, "Experimental evaluation of CMUTs with vented cavties under varying pressure," in Proc. 2013 Joint UFFC, EFTF and PFM Symposium, pp. 1724-1727
4. N. Apte, K. K. Park, and B. T. Khuri-Yakub, "Finite Element Analysis of CMUTs with Pressurized Cavities," in Proc. IEEE International Ultrasonics Symposium 2012, pp. 979-982
5. M. Bao and H. Yang, "Squeeze film air damping in MEMS," in Sensors and Actuators A: Physical, Vol. 136, Issue 1, 2007, pp. 3-27