Design and realization of a long-stroke translation stage for metrological AFM

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

Volumn 1, Issue , 2009, Pages 176-179

  Werner, C ^a   Rosielle, P C J N ^a   Steinbuch, M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ELASTIC TRANSLATIONS; LONG STROKES; LOW HYSTERESIS; TRANSLATION STAGE;

PRECISION ENGINEERING;

EID: 84908277000     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. H Danzebrink, L Koenders et al 2007 Advances in Scanning Force Microscopy for Dimensional Metrology CIRP 55 (2) 862-4
2. G Dai, F Pohlenz et al 2004 Metrological Large Range Scanning Probe Microscope Rev. Sci. Instrum. 75 444-50
3. www. NanoStage3D. com