Versatile silicon-oxynitride planar lightwave circuits for interconnect applications

Proceedings - 6th International Conference on Parallel Interconnects, PI 1999

Volumn , Issue , 1999, Pages 145-148

  Bona, G L ^a   Germann, R ^a   Horst, F ^a   Offrein, B J ^a   Salemink, H W M ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

NITRIDES; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SILICA; SILICON; SILICON COMPOUNDS; SILICON NITRIDE; SILICON OXIDES; SINGLE MODE FIBERS; TIMING CIRCUITS; WAVEGUIDE COMPONENTS; WAVEGUIDES;

INTERCONNECT APPLICATIONS; LIGHTWAVE CIRCUITS; NITROGEN CONTENT; PLANAR LIGHT-WAVE CIRCUITS; PLANAR OPTICAL WAVEGUIDES; SILICON OXYNITRIDES; STANDARD SINGLE MODE FIBERS; WAVEGUIDE STRUCTURE;

NITROGEN COMPOUNDS;

EID: 84908161739     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PI.1999.806406     Document Type: Conference Paper

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