A study of temperature distribution in soi-smart power devices in transient conditions by optical interferometry

European Solid-State Device Research Conference

Volumn , Issue , 1997, Pages 512-515

  Seliger, N ^a   Pogany, D ^a   Furbock, C ^a   Habas, P ^a   Gornik, E ^a   Stoisiek, M ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FABRY-PEROT INTERFEROMETERS;

FABRY-PEROT RESONATORS; OPTICAL INTERFEROMETRY; OPTICAL REFLECTIVITY; SOI POWER DEVICES; TEMPERATURE VARIATION; THERMAL SIMULATIONS; THERMALLY INDUCED; TRANSIENT CONDITIONS;

TEMPERATURE DISTRIBUTION;

EID: 84907540571     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.1997.194478     Document Type: Conference Paper

References (8)

1. W. P. Maszara, J. Electrochem. Soc. (138), 341 (1991).
2. M. B. Kleiner, S. A. Khn and W. Weber, IEEE Trans. Electron Devices (43), 1602 (1997).
3. J. Korec, Mat. Sc. and Eng. B29, 1 (1995).
4. M. Stoisiek, K.-G. Oppermann, U. Schwalke and D. Takacs, in Proc. ISPSD95, 325 (1995).
5. H. Icenogle, B. Platt and W. Wolfe, Applied Optics (10), 23-48 (1976).
6. N. Seliger, P. Habaš and E. Gornik, in Proc. of ESSDERC96, 847 (1996).
7. M. Born and E. Wolf, Principles of Optics , Pergamon Press, New York (1985).
8. ANSYS 5.0, User s Manual , Swanson Analysis Systems, Inc. (1992).