High sensitivity photonic crystal pressure sensor

Journal of the European Optical Society

Volumn 2, Issue , 2007, Pages

  Biallo, D ^a   De Sario, M ^a   D'Orazio, A ^a   Marrocco, V ^a   Petruzzelli, V ^a   Vincenti, M A ^a   Prudenzano, F ^a   Stomeo, T ^b   Grande, M ^b   Visimberga, G ^b   Cingolani, R ^b   De Vittorio, M ^b  

^a POLITECNICO DI BARI   (Italy)

^b NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

Integrated optics; Optical waveguide; Sensor

Indexed keywords

GALLIUM ARSENIDE; III-V SEMICONDUCTORS; INTEGRATED OPTICS; PHOTONIC CRYSTALS; PRESSURE SENSORS; REFRACTIVE INDEX; SENSORS;

APPLIED PRESSURE; GAAS MEMBRANE; HIGH SENSITIVITY; LINEAR CALIBRATION CURVE; PHOTONIC CRYSTAL WAVEGUIDE; SENSING SURFACE; THEORETICAL MODELING; TWO-DIMENSIONAL PHOTONIC CRYSTALS;

OPTICAL WAVEGUIDES;

EID: 84907422194     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2007.07017     Document Type: Article

References (19)

1. J. D. Joannopoulos, R. D. Meade, J. N. Winn, Photonic Crystals-Molding the flow of light (Princeton University press, 1995).
2. E. Yablonovitch, "Photonic Band Gap Structures" J. Opt. Soc. Am. B 10, 283-295 (1993).
3. E. Chow, A. Grot, L. W. Mirkarimi, M. Sigalas, G. Girolami, "Ultracompact biochemical sensor built with two-dimensional photonic crystal microcavity" Optics Lett. 29, 1093-1095 (2004).
4. O. Levy, B. Z. Steinberg, M. Nathan and A. Boag, "Ultrasensitive displacement sensing using photonic crystal waveguides" Appl. Phys. Lett. 86, 104102 (2005).
5. Z. Xu, L. Cao, C. Gu, Q. He and G. Jin, "Micro displacement sensor based on line-defect resonant cavity in photonic crystal" Opt. Express 14, 298-305 (2006).
6. S. Baglio, M. Bloemer, N. Savalli, M. Scalora "Development of novel optoelectromechanical systems based on "Transparent metals" PBG structures", IEEE Sens. J. 1, 288-295 (2001).
7. W. Suh, M. F. Yanik, O. Solgaard and S. Fan, "Displacementsensitive photonic crystal structures based on guided resonance in photonic crystal slabs" Appl. Phys. Lett. 82, 1999-2001 (2003).
8. Y. Akahane, T. Asano, B. Song and S. Noda, "Fine-tuned high-Q photonic-crystal nanocavity" Opt. Express 13, 1202-1214 (2005).
9. T. Yoshie, J. Vuckovic, A. Sherer, H. Chen and D. Deppe, "High quality two-dimensional photonic crystal slab cavities" App. Phys. Lett. 79, 4289-4291 (2001).
10. Y. Akahane, T. Asano, H. Takano, B. Song, Y. Takana, S. Noda, "Twodimensional photonic-crystal-slab channel-drop filter with flat top response" Opt. Express 13, 2512-2530 (2005).
11. I. P. Kaminow, An Introduction to Electrooptic Device (Academic Press, 1974).
12. J. F. Nye, Physical Properties of Crystal (Oxford Science Publications, 1955).
13. E. D. Palik, Handbook of Optical Constants of Solids (Academic Press, 1991).
14. D. T. F. Marple, "Refractive index of GaAs" J. App. Phys. 35, 1241-1242 (1964).
15. M. J. Cryan, D. C. Wong, I. J. Craddock, S. Yu, J. Rorison and C. J. Railton, " Calculation of losses in 2-D photonic crystal membrane waveguides using 3D-FDTD method", IEEE Photinic. Tech. L. 17, 58-60 (2005).
16. Y. Sugimoto, Y. Tanaka, N. Ikeda, Y. Nakamura, K. Asakawa, "Low propagation loss of 0.76 dB/mm in GaAs-based single line-defect two-dimensional photonic crystal slab waveguides up to 1 cm in length" Opt. Express 12, 1090-1096 (2004).
17. B. Min, J. Min, H. Y. Park, "High efficiency surface emitting channel drop filters in two-dimensional photonic crystal slabs" Appl. Phys. Lett. 86, 011106 (2004).
18. M. Imada, S. Noda, A. Chutinan, M. Mochizuki, T. Tamaka, " Channel drop filter using a single defect in a 2-D photonic crystal slab waveguide" J. Lightwave Technol. 20, 873-878 (2002).
19. D. Biallo, A. D'Orazio, M. De Sario, V. Marrocco, V. Petruzzelli, M. A. Vincenti, F. Prudenzano, T. Stomeo, M. Grande, G. Visimberga, R. Cingolani, M. De Vittorio, "Design of a Photonic Crystal Microcavity Pressure Sensor" EOS Topical Meeting on Nanophotonics, Metamaterials and Optical Microcavities TOM 3, 187-188 (2006).