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Volumn 69, Issue 2, 1998, Pages 846-848
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Characteristics of electron cyclotron resonance plasmas for large area ion source application
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 84906537145
PISSN: 00346748
EISSN: 10897623
Source Type: Journal
DOI: 10.1063/1.1148579 Document Type: Conference Paper |
Times cited : (3)
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References (6)
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