High precision laser induced etching of multilayered MoS 2

AIP Conference Proceedings

Volumn 1585, Issue , 2014, Pages 73-76

  Ko, P J ^a   Thu, T V ^a   Takahashi, H ^a   Abderrahmane, A ^a   Takamura, T ^a   Sandhu, A ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Etching; Photoluminescence; Raman spectra; Surface irradiation effects

Indexed keywords

EID: 84906348387     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.4866622     Document Type: Conference Paper

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