High resolution Hall magnetic sensors

Proceedings of the International Conference on Microelectronics, ICM

Volumn , Issue , 2014, Pages 69-74

  Popovic, R S ^a,b,c  

^a EPFL   (Switzerland)

^b SENIS AG   (Switzerland)

^c Sentronis AD Niš ^*  (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

HALL EFFECT TRANSDUCERS; MICROELECTRONICS;

HALL DEVICES; HIGH RESOLUTION; INTRINSIC NOISE; MAGNETIC FLUX CONCENTRATORS; MAGNETIC SENSITIVITY; PHYSICAL LIMITS; SENSOR SYSTEMS; SPINNING CURRENT;

MAGNETIC SENSORS;

EID: 84904709165     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIEL.2014.6842087     Document Type: Conference Paper

References (27)

1. E. H. Hall, "On a new action of magnetism on a permanent electric current", Am. J. Sci. series 3, 20 161-186.
2. R. S. Popovic, "Hall Effect Devices", 2nd ed., IOP Publishing Bristol and Philadelphia, 2004.
3. R. S. Popovic, "The vertical Hall-effect device", IEEE Electron Device Letters, EDL-5, 357-358 (1984).
4. D.R. Popovic, S. Dimitrijevic, M. Blagojevic, P. Kejik, E. Schurig, R.S. Popovic, "Three-axis teslameter with integrated Hall probe", IEEE Trans. Instrumentation and Measurement, 1396-1402, 56, 2007.
5. M. A. Paun, J. M. Sallese M. Kayal, .,Comparative Study on the Performance of Five Different Hall Effect Devices", Sensors 2013, 13, 2093-2112.
6. Pascal, J. ; ULP Strasbourg, Strasbourg Hebrard, L. ; Kammerer, J. ; Frick, V., "A Vertical Hall Device in Standard Submicron CMOS Technology", Sensors 2007, 1480-1483, IEEE
7. H. P. Hohe, "Integrierter 3D-Magnetfeldsensor", http://www.tuchemnitz. de/etit/messtech/imc/061208IEEE02.pdf
8. E. Schurig, "Highly sensitive vertical Hall sensors in CMOS technology", PhD Thesis, EPFL, Lausanne, 2005.
9. R. S. Popovic, "New horizontal and vertical Hall devices in 0.35μm CMOS technology", 2014 SENIS AG, unpublished.
10. N. Haned and M.Missous, "Nano-tesla magnetic field magnetometry using an InGaAs-AlGaAs-GaAs 2DEG Hall sensor, Sensors and Actuators A 102, 2003.
11. J. T. Maupin and M. L. Geske, "The Hall effect in silicon circuits", in: C.L. Chien and C.R. Westgate (eds) The Hall Effect and its Applications (New York: Plenum) 1980.
12. S.G. Taranow et al, "Method for the compensation of the nonequipotental voltage in the Hall voltage and means for its realization", German Patent Application 2333080, 1973.
13. H. P. Hohe, N. Weber and D. Seitzer, Sensor Topology for Offset Reduction in Hall-Effect Devices, Proceedings Eurosensors XIII, pp. 605-608, 1999.
14. A. Udo, "Limits of offset cancellation by the principle of spinning current Hall probe", Proceedings of IEEE Sensors, 2004.
15. R.S. Popovic, P.M. Drljaca, P. Kejik, "CMOS magnetic sensors with integrated ferromagnetic parts", Sensors & Actuators A: Physical 129, 94-99 (2006).
16. A. Bakker, A. Bellekom, S. Middelhoek, J. H. Huijsing, "Low offset low noise 3.5 mV CMOS spinning current Hall effect sensor with integrated chopper amplifier", in: Proceedings of the XIII Europen Conference on Solid-State Tranducers, Hague, September 1999
17. J.C. van der Meer, F.R. Riedijk, P.C. de Jong, E.A. van Kampen, M.J. Meekel, J.H. Huijsing, "A fully integrated CMOS Hall sensor with a 3.65μT 3σ offset for compass applications", IEEE International Solid-State Circuits Conference, 2005.
18. David Jobling LEM, Advances in ASICs for Open Loop Hall-Effect Based Current Transducers, Bodós Power Systems, May 2012, pp. 66-68.
19. CSA-1V: http://www.melexis.com/Hall-Effect-Sensor-ICs/Triaxis%C2%AE-Hall- ICs/CSA-1V-614.aspx
20. IEEE Spectrum February 2010: http://spectrum.ieee.org/semiconductors/ devices/a-compassin-every-smartphone; and IOP, a website of the Institute of Physics, Jun 22, 2010: http://asia.iop.org/cws/article/news/42833
21. AK8975, 3-axis electronic compass IC http://www.akm.com/akm/en/product/ datasheet1/?partn o=AK8975
22. A. Karlain and V. Mosser, "Low frequency noise suppression in III-V Hall magnetic microsystems with integrated switches", Sensor Letters, 192-195, 5, 2007.
23. S. Yamada, H. Geka, A.Okamoto, H.Goto, I. Shibasaki, K. Nishimura. "Measurement of very small voltage oscillations appeared between Hall voltage electrodes of the Sn-doped InSb single crystal thin film Hall elements at no magnetic field and very small magnetic field detection", 23rd Symposium on Sensors, Micromachine and Applied Systems, Japan, 2006.
24. D. R. Popovic Renella, R. S. Popovic, Hall magnetic transducers with NMR-like resolution, IMMW 16-INTERNATIONAL MAGNETIC MEASUREMENT WORKSHOP, Bad Zurzach, Switzerland, 26-29 October 2009.
25. S. M. Dimitrijevic, R. S. Popovic, Hall Teslameter with NMR-like Accuracy, IMMW 17-INTERNATIONAL MAGNETIC MEASUREMENT WORKSHOP, La Mola, Terrassa-Barcelona, Catalonia (Spain) 18-23 September 2011.
26. www.senis.ch (see: Low Noise Magnetic Field Transducer).
27. R. S. Popovic at all., internal reports of SENIS and Sentronis, unpublished.