Micromachining of carbon materials and Laser Micropatterning of metal films used as masks for reactive ion etching

Journal of Laser Micro Nanoengineering

Volumn 1, Issue 1, 2006, Pages 67-73

  Kuhnke, Markus ^a   Dumitru, Gabriel ^b   Lippert, Thomas ^a   Ortelli, Enrico ^c   Scherer, Günther G ^a   Wokaun, Alexander ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b UNIVERSITY OF APPLIED SCIENCES AND ARTS NORTHWESTERN SWITZERLAND   (Switzerland)

^c DYCONEX AG   (Switzerland)

Author keywords

Glassy carbon; Laser ablation; Metal film; Micro fuel cell; PVDF; Reactive ion etching; Sigracet; Sigradur

Indexed keywords

EID: 84903453040     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2006.01.0013     Document Type: Article

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