Characterization of a new generic 3D polymer technology for microtas

Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn 1, Issue , 2005, Pages 687-689

  Abgrall, Patrick ^a   Chuda, Katarzyna ^b   Coqueret, Xavier ^b   Gué, Anne Marie ^a  

^a CNRS   (France)

^b UNITÉ DE CATALYSE ET DE CHIMIE DU SOLIDE   (France)

Author keywords

SU 8; Surface modification; Three dimensional microfabrication

Indexed keywords

LAMINATING; PHOTOLITHOGRAPHY; SURFACE TREATMENT;

3-D MICROFLUIDIC; LAB-ON-A-CHIP DEVICES; MICROTAS; PHOTOCURABLE; POLYMER FABRICATIONS; POLYMER TECHNOLOGY; SU-8; THREE-DIMENSIONAL MICRO-FABRICATION;

CHEMICAL ANALYSIS;

EID: 84902472374     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. S. Tuomikoski and S. Franssila, Free-standing SU-8 microfluidic chips by adhesive bonding and release etching, Sensors Actuators A, 120, 408-415, (2005).
2. F.J. Blanco, M. Agirregabiria, J. Garcia, J. Berganzo, M. Tijero, M.T. Arroyo, J.M. Ruano, I. Aramburu and K. Mayora, Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding, J. Micromech. Microeng., 14, 1047-1056, (2004).
3. Y. Song, C.S.S.R. Kumar and J. Hormes, Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a 'flexible semi-solid transfer' (FST) process, J. Micromech. Microeng., 14, 932-940, (2004).