Microfabrication of rounded channel and waveguide integrated microlens using timed development and thermal reflow process

Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn , Issue , 2009, Pages 1365-1367

  Kim, Jungkwun ^a   Lee, Kangsun ^a   Oh, Kwang W ^a   Yoon, Yong Kyu ^a  

^a State University of New York   (United States)

Author keywords

Microlens; Rounded channel; Sphericity; Thermal reflow; Timed development

Indexed keywords

AUTOMOBILE MANUFACTURE; FLUIDIC DEVICES; WAVEGUIDES;

MICRO-LENS; ROUNDED CHANNEL; SPHERICITY; THERMAL REFLOW; TIMED DEVELOPMENT;

MICROLENSES;

EID: 84899500531     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Kangsun Lee, C Kim, K. S. Shin, J. W. Lee, B. K. Ju, T. S. Kim, S. K. Lee and Ji Yoon Kang, "Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixer," J. Micromech. Microeng. 17 1533-1541(2007)
2. Jungkwun Kim, M.G. Allen, and Yong-Kyu 'YK' Yoon, "Automated dynamic mode multidirectional UV lithography for complex 3-D microstructures," The IEEE International Conference on MEMS 2008, pp.399-402, 13-17 Jan. (2008)
3. A. W. Adamson, and A. P. Gast, Physical Chemistry of Surfaces, Wiley, New York, Ch. 2, (1997)