Thermodynamic and kinetic aspects of AlN crystal formation on (0001)Al2O3 surface by ammonia MBE

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 11, Issue 3-4, 2014, Pages 613-616

  Malin, Timur ^a   Mansurov, Vladimir ^a   Galitsyn, Yury ^a   Zhuravlev, Konstantin ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

AlN film; Ammonia; Chemical kinetics; Diffraction; Phase transition

Indexed keywords

AMMONIA; DIFFRACTION; PHASE TRANSITIONS; REACTION KINETICS; SURFACE REACTIONS; TEMPERATURE;

ALN FILMS; CRITICAL TEMPERATURES; CRYSTAL FORMATION; HIGH TEMPERATURE RANGE; LATERAL INTERACTIONS; NITRIDATION PROCESS; SURFACE PHASE TRANSITIONS; TEMPERATURE DEPENDENCE;

KINETICS;

EID: 84898539736     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.201300674     Document Type: Article

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