메뉴 건너뛰기




Volumn , Issue , 2003, Pages

Measurement of gas temperature and rotational distribution of H2(X1 Σ+g) in a radio-frequency capacitive discharge plasma by cars spectroscopy techniques

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGES; COHERENT ANTI-STOKES RAMAN SCATTERING SPECTROSCOPIES; GROUND ELECTRONIC STATE; NONEQUILIBRIUM CONDITIONS; POPULATION DENSITIES; ROTATIONAL DISTRIBUTIONS; ROTATIONAL TEMPERATURE; VIBRATIONAL TEMPERATURE;

EID: 84897678592     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (46)
  • 1
    • 84897687440 scopus 로고
    • Plasma Etching, edited by D. M. Manos and D. L. Flamm (Boston, San Diego, New York, Berkeley, London, Sydney, Tokyo, Toronto
    • Plasma Etching, edited by D. M. Manos and D. L. Flamm (Boston, San Diego, New York, Berkeley, London, Sydney, Tokyo, Toronto 1989), pp. 2-471
    • (1989) , pp. 2-471
  • 2
    • 84897741454 scopus 로고
    • Radio-Frequency Capacitive Discharges: Physics. Experimental technique Applications
    • Y. P. Raizer, M. N. Shnaider and N. A. Yatsenko, Radio-Frequency Capacitive Discharges: Physics. Experimental technique. Applications, (Fiz. Publ. Comp., Moscow, 1995)
    • (1995) Fiz. Publ. Comp., Moscow
    • Raizer, Y.P.1    Shnaider, M.N.2    Yatsenko, N.A.3
  • 3
    • 84897723901 scopus 로고
    • Nonequilibrium Vibrational Kinetics, edited by M. Capitelli, of Topics in Current Physics series), Springer- Verlag, Berlin
    • Nonequilibrium Vibrational Kinetics, edited by M. Capitelli (Vol. 39 of Topics in Current Physics series), Springer- Verlag, Berlin (1986).
    • (1986) , vol.39
  • 4
    • 84897723902 scopus 로고
    • Plasma diagnostics, edited by W. Lochte- Holtgreven American Elsevier, New- York
    • Plasma diagnostics, edited by W. Lochte- Holtgreven (American Elsevier, New- York, 1968).
    • (1968)
  • 5
    • 84897723897 scopus 로고
    • Laser spectroscopy, Basic concepts and instrumentation, (Springer- Verlag, Berlin, Heidelberg, New York
    • W. Demtroder, Laser spectroscopy, Basic concepts and instrumentation, (Springer- Verlag, Berlin, Heidelberg, New York 1982).
    • (1982)
    • Demtroder, W.1
  • 6
    • 0035250221 scopus 로고    scopus 로고
    • Time dependence of rotational state populations of excited hydrogen molecules in an RF excited plasma reactor
    • T. Gans, V. Schulz-von der Gathen and H.F. Dobele, Time dependence of rotational state populations of excited hydrogen molecules in an RF excited plasma reactor, Plasma Sources Sci. Technol. 10 (2001) 17-23
    • (2001) Plasma Sources Sci Technol , vol.10 , pp. 17-23
    • Gans, T.1    Schulz-Von der Gathen, V.2    Dobele, H.F.3
  • 7
    • 0034301217 scopus 로고    scopus 로고
    • In-situ Diagnostics in Plasma of Electronic-Ground-State Hydrogen Molecules in High Vibrational and Rotational States by Laser by Laser Induced Fluorescence with Vacuum Ultraviolet Radiation
    • T. Mosbach, H.M. Katsch and H.F. Dobele, In-situ Diagnostics in Plasma of Electronic-Ground-State Hydrogen Molecules in High Vibrational and Rotational States by Laser by Laser Induced Fluorescence with Vacuum Ultraviolet Radiation, Phys. Rev. Letters, 85 (2000) 3420-3423.
    • (2000) Phys. Rev. Letters , vol.85 , pp. 3420-3423
    • Mosbach, T.1    Katsch, H.M.2    Dobele, H.F.3
  • 8
    • 0019008634 scopus 로고
    • Populations of the rotational levels of the d3Pu, v states of H2, HD and D2 in an RF discharge
    • B.P. Lavrov, A.A. Sobol'ev and M.V. Tyutchev, Populations of the rotational levels of the d3Pu, v states of H2, HD and D2 in an RF discharge, J. Appl. Spectrosc., 1980, v.32, No 4, p. 316-320.
    • (1980) J. Appl. Spectrosc , vol.32 , Issue.4 , pp. 316-320
    • Lavrov, B.P.1    Sobol'ev, A.A.2    Tyutchev, M.V.3
  • 9
    • 84897723898 scopus 로고    scopus 로고
    • Raman Spectroscopy of Gases and Liquids, edited by A. Weber (Springer-Verlag Berlin, Heidelberg, New York
    • Raman Spectroscopy of Gases and Liquids, edited by A. Weber (Springer-Verlag Berlin, Heidelberg, New York, 1979), pp. 252-299.
    • , vol.1979 , pp. 252-299
  • 10
    • 0019663287 scopus 로고
    • Progress in quantum electronics
    • S.A. Druet and J.P.E. Taran, CARSspectroscopy, Progress in quantum electronics, Vol.7, No 1, 1981, pp.
    • (1981) CARSspectroscopy , vol.7 , Issue.1
    • Druet, S.A.1    Taran, J.P.E.2
  • 11
    • 0017516496 scopus 로고    scopus 로고
    • A review of theory applications of the coherent anti-Stokes Raman spectroscopy (CARS)
    • W. Y. Tolles, J.W. Nibler, J.R. McDonald, A.B. Harvey, A review of theory applications of the coherent anti-Stokes Raman spectroscopy (CARS), Appl. Spectroscopy, Vol. 31, 1997, pp.
    • (1997) Appl. Spectroscopy , vol.31
    • Tolles, W.Y.1    Nibler, J.W.2    McDonald, J.R.3    Harvey, A.B.4
  • 12
    • 0041296096 scopus 로고
    • Direct determination of non- Boltzmann vibrational level populations in electric discharges by CARS
    • W.M. Shaub, J.W. Nibler, and A.B. Harvey, Direct determination of non- Boltzmann vibrational level populations in electric discharges by CARS, The Journal of Chemical Physics, Vol. 67, No 5, 1977, pp. 1883-1886.
    • (1977) The Journal of Chemical Physics , vol.67 , Issue.5 , pp. 1883-1886
    • Shaub, W.M.1    Nibler, J.W.2    Harvey, A.B.3
  • 13
    • 2542533629 scopus 로고
    • Temperature Determination and CARS spectroscopy of the vibrational-rotational states of nitrogen molecules excited by discharge
    • V.V. Smirnov and V.I. Fabelinskii, Temperature Determination and CARS spectroscopy of the vibrational-rotational states of nitrogen molecules excited by discharge, JETP Lett. 28 (1978), pp.424-427
    • (1978) JETP Lett , vol.28 , pp. 424-427
    • Smirnov, V.V.1    Fabelinskii, V.I.2
  • 15
    • 0023453902 scopus 로고
    • Determination of N2(X) vibrational level populations and rotational temperatures using CARS in a D.C. low pressure discharge
    • B. Massabieaux, G. Gousset, M. Lefebvre and M. Pealat, Determination of N2(X) vibrational level populations and rotational temperatures using CARS in a D.C. low pressure discharge, J. Physique 48 (1987) 1939-1949.
    • (1987) J. Physique , vol.48 , pp. 1939-1949
    • Massabieaux, B.1    Gousset, G.2    Lefebvre, M.3    Pealat, M.4
  • 18
    • 21844511278 scopus 로고
    • Determination of the rate constants for VV exchange in a nitrogen glow discharge by CARS spectroscopy, Tech
    • O.A. Gordeev and V.A. Shakhatov, Determination of the rate constants for VV exchange in a nitrogen glow discharge by CARS spectroscopy, Tech. Phys. 40 (7), 1995, pp. 656-661.
    • (1995) Phys , vol.40 , Issue.7 , pp. 656-661
    • Gordeev, O.A.1    Shakhatov, V.A.2
  • 19
    • 2542561086 scopus 로고    scopus 로고
    • Determination of the rate constants for VV exchange in a nitrogen glow discharge by CARS spectroscopy, European Conference Abstracts: ESCAMPIG XIIIth
    • V.A. Shakhatov, Determination of the rate constants for VV exchange in a nitrogen glow discharge by CARS spectroscopy, European Conference Abstracts: ESCAMPIG XIIIth, Poprad (Slovakia), 1996, vol. 20 E, Part B, pp. 449
    • (1996) Poprad (Slovakia) , vol.20 , pp. 449
    • Shakhatov, V.A.1
  • 20
    • 2542530546 scopus 로고    scopus 로고
    • The Possibility of Local Nonperturbing Diagnostics of the Electron Component in a Glow Discharge Plasma in Nitrogen by CARS spectroscopy
    • A.V. Bodronosov, K.A. Vereschagin, O.A. Gordeev, V.V. Smirnov, and V.A. Shakhatov, The Possibility of Local Nonperturbing Diagnostics of the Electron Component in a Glow Discharge Plasma in Nitrogen by CARS spectroscopy, High Temperature, Vol. 34, No 5, 1996, pp. 656-665.
    • (1996) High Temperature , vol.34 , Issue.5 , pp. 656-665
    • Bodronosov, A.V.1    Vereschagin, K.A.2    Gordeev, O.A.3    Smirnov, V.V.4    Shakhatov, V.A.5
  • 22
    • 0031482665 scopus 로고    scopus 로고
    • CARS study of the vibrational kinetics of nitrogen molecules in the burning and afterglow stages of a pulsed discharge, Tech
    • K.A. Vereschagin, V.V. Smirnov, and V.A. Shakhatov, CARS study of the vibrational kinetics of nitrogen molecules in the burning and afterglow stages of a pulsed discharge, Tech. Phys. 42 (5), 1997, pp. 487-494.
    • (1997) Phys , vol.42 , Issue.5 , pp. 487-494
    • Vereschagin, K.A.1    Smirnov, V.V.2    Shakhatov, V.A.3
  • 23
    • 0016986867 scopus 로고
    • CARS Measurement of Vibrational Temperatures in Electric Discharges
    • J. W. Nibler, J.R. McDonald, and A.B. Harvey, CARS Measurement of Vibrational Temperatures in Electric Discharges, Optics Communications, Volume 18, Number 3, 1976, pp. 371-373.
    • (1976) Optics Communications , vol.18 , Issue.3 , pp. 371-373
    • Nibler, J.W.1    McDonald, J.R.2    Harvey, A.B.3
  • 24
    • 0039304385 scopus 로고
    • Vibrational excitation in H2 and D2 electric discharges
    • J.A. Shirley and R.J. Hall, Vibrational excitation in H2 and D2 electric discharges, J. Chem. Phys., vol. 67, No 6, 1977, pp. 2419-2421.
    • (1977) J. Chem. Phys , vol.67 , Issue.6 , pp. 2419-2421
    • Shirley, J.A.1    Hall, R.J.2
  • 25
    • 0026169366 scopus 로고
    • Temperature Measurements by H2 - CARS in the Reactive Zone of a Plasma Test Reactor for Hydrocarbon Synthesis
    • V. Kornas, V. Shulz-von der Gathen, T. Bornemann, H.F. Dobele, and G. Prosz, Temperature Measurements by H2 - CARS in the Reactive Zone of a Plasma Test Reactor for Hydrocarbon Synthesis, Plasma Chemistry and Plasma Processing, Vol. 11, No 2, 1991, pp. 171-184.
    • (1991) Plasma Chemistry and Plasma Processing , vol.11 , Issue.2 , pp. 171-184
    • Kornas, V.1    Shulz-von der Gathen, V.2    Bornemann, T.3    Dobele, H.F.4    Prosz, G.5
  • 26
    • 0025516921 scopus 로고
    • CVD diamond deposition processes i n vestigation: CARS diagnostics/modelling
    • S.O. Hay, W. C. Roman, and M. B. Colket III, CVD diamond deposition processes i n vestigation: CARS diagnostics/modelling, J. Mater. Res., Vol. 5, No 11, Nov. 1990.
    • (1990) J. Mater. Res , vol.11 , pp. 5
    • Hay, S.O.1    Roman, W.C.2    Colket III, M.B.3
  • 27
    • 0000670812 scopus 로고
    • Temperature and concentration distribution of H2 and H atoms in hotfilament chemical vapor deposition of diamond
    • Kuei-Hsien Chen, Mei-Chen Chuang, C. Murray Penney, and W. F. Banholzer, Temperature and concentration distribution of H2 and H atoms in hotfilament chemical vapor deposition of diamond, J. Appl. Phys. 71 (3), 1992, pp. 1485-1493.
    • (1992) J. Appl. Phys , vol.71 , Issue.3 , pp. 1485-1493
    • Chen, K.-H.1    Chuang, M.-C.2    Murray, P.C.3    Banholzer, W.F.4
  • 28
    • 0030781198 scopus 로고    scopus 로고
    • Multiplex H2 CARS thermometry in a microwave assisted diamond CVD plasma
    • C.F. Kaminski, P. Evart, Multiplex H2 CARS thermometry in a microwave assisted diamond CVD plasma, Appl. Phys. B 64, 103-109 (1997).
    • (1997) Appl. Phys. B , vol.64 , pp. 103-109
    • Kaminski, C.F.1    Evart, P.2
  • 29
    • 0030373047 scopus 로고    scopus 로고
    • Temperature profile measurements in stagnation-flow diamond-forming flames using hydrogen CARS spectroscopy
    • Pittsburgh, Pa., Jul./Aug. 1996
    • K.E. Bertagnolli and R.P. Lucht, Temperature profile measurements in stagnation-flow diamond-forming flames using hydrogen CARS spectroscopy. Proc. 26th Int. Symp. On Combust. (Pittsburgh, Pa., Jul./Aug. 1996) 1825-1833 (1997).
    • (1997) Proc. 26th Int. Symp. On Combust , pp. 1825-1833
    • Bertagnolli, K.E.1    Lucht, R.P.2
  • 30
    • 0030148155 scopus 로고    scopus 로고
    • In situ optical analysis of the gas phase during the deposition of silicon carbide from methyltrichlorosilane
    • M. Ganz, N. Dorval, M. Lefebvre, M. Pealat, F. Loumagne, F. Laglais, In situ optical analysis of the gas phase during the deposition of silicon carbide from methyltrichlorosilane, Journal of the Electrochemical Society, Vol. 143, No 5, 1996, p. 1654-1661.
    • (1996) Journal of the Electrochemical Society , vol.143 , Issue.5 , pp. 1654-1661
    • Ganz, M.1    Dorval, N.2    Lefebvre, M.3    Pealat, M.4    Loumagne, F.5    Laglais, F.6
  • 31
    • 36549092114 scopus 로고
    • Rovibrational molecular populations, atoms, and negative ions in H2 and D2 magnetic multicusp discharges
    • M. Pealat, J-P. Taran, M. Bacal and F. Hilion, Rovibrational molecular populations, atoms, and negative ions in H2 and D2 magnetic multicusp discharges, J. Chem. Phys., vol. 82, No 11, 1985, pp. 4943-4953.
    • (1985) J. Chem. Phys , vol.82 , Issue.11 , pp. 4943-4953
    • Pealat, M.1    Taran, J.-P.2    Bacal, M.3    Hilion, F.4
  • 33
    • 2542564085 scopus 로고
    • Local rotational distributions of H2 (X g 1S+) molecules in glow discharges
    • V.N. Ochkin, S. Yu. Savinov, N. N. Sobolev, S.N. Tskhai, Local rotational distributions of H2 (X g 1S+) molecules in glow discharges, Sov. Phys. - Tech. Phys. (USA), v. 33, No 7, 1988, pp. 763-767.
    • (1988) Sov. Phys. - Tech. Phys. (USA) , vol.33 , Issue.7 , pp. 763-767
    • Ochkin, V.N.1    Savinov, S.Y.2    Sobolev, N.N.3    Tskhai, S.N.4
  • 34
    • 2542641460 scopus 로고
    • Diagnostics of plasmas by CARS (coherent anti-Stokes Raman scattering)
    • M. Lefebvre, M. Pealat and J.P. Taran, Diagnostics of plasmas by CARS (coherent anti-Stokes Raman scattering), Pure and Appl. Chem., Vol. 64, No 5, 1992, pp. 685-689.
    • (1992) Pure and Appl. Chem , vol.64 , Issue.5 , pp. 685-689
    • Lefebvre, M.1    Pealat, M.2    Taran, J.P.3
  • 35
    • 0005299877 scopus 로고    scopus 로고
    • Determination of Gas Temperature of a Non-Equilibrium Plasma From the Intensity Distribution in the Rotational Structure of Bands of H2
    • S.A. Astashkevich, M.V. Kalachev, B.P. Lavrov, V.L. Ovtchinnikov, Determination of Gas Temperature of a Non-Equilibrium Plasma From the Intensity Distribution in the Rotational Structure of Bands of H2. Opt. Spectrosc. Vol. 87, No 2, 1999, pp. 203-211.
    • (1999) Opt. Spectrosc , vol.87 , Issue.2 , pp. 203-211
    • Astashkevich, S.A.1    Kalachev, M.V.2    Lavrov, B.P.3    Ovtchinnikov, V.L.4
  • 36
    • 0022774116 scopus 로고
    • Algorithms for calculating coherent anti- Stokes Raman spectra: Application to several small molecules
    • J.C. Luthe, E.J. Beiting and F.Y. Yueh, Algorithms for calculating coherent anti- Stokes Raman spectra: application to several small molecules, Computer Physics Communications 42 (1986), 73-92
    • (1986) Computer Physics Communications , vol.42 , pp. 73-92
    • Luthe, J.C.1    Beiting, E.J.2    Yueh, F.Y.3
  • 37
    • 36749118881 scopus 로고
    • CARS spectroscopy of molecules in supersonic free jets
    • P. Huber-Walchli and J. W. Nibler, CARS spectroscopy of molecules in supersonic free jets, J. Chem. Phys. 76 (1), 1982, 273-284
    • (1982) J. Chem. Phys , vol.76 , Issue.1 , pp. 273-284
    • Huber-Walchli, P.1    Nibler, J.W.2
  • 39
    • 0001447151 scopus 로고
    • Measurement of the Self-Broadening of the H2 Q(0-5) Raman Transitions from 295 to 1000 K
    • A. Rahn and R. L. Farrow, Measurement of the Self-Broadening of the H2 Q(0-5) Raman Transitions from 295 to 1000 K, Phys. Rev. A, vol. 43, No 11, (1991), pp. 6075-6088.
    • (1991) Phys. Rev. A , vol.43 , Issue.11 , pp. 6075-6088
    • Rahn, A.1    Farrow, R.L.2
  • 40
    • 36549092426 scopus 로고
    • On the coupling of electron and vibrational energy distribution in H2, N2 and CO post discharges
    • C. Gorse, M. Capitelli and A. Ricard, On the coupling of electron and vibrational energy distribution in H2, N2 and CO post discharges. J. Chem. Phys. 82, No 4, 1900-1906 (1985)
    • (1985) J. Chem. Phys , vol.82 , Issue.4 , pp. 1900-1906
    • Gorse, C.1    Capitelli, M.2    Ricard, A.3
  • 41
    • 0035894957 scopus 로고    scopus 로고
    • A one -dimensional, self -conistent model of charged particle transport and vibrational kinetics in weakly ionized hydrogen
    • S. Longo, A. Milella, A one -dimensional, self -consistent model of charged particle transport and vibrational kinetics in weakly ionized hydrogen. Chemical Physics 274 (2001) 219-229.
    • (2001) Chemical Physics , vol.274 , pp. 219-229
    • Longo, S.1    Milella, A.2
  • 44
    • 36449005106 scopus 로고
    • A flat flame burner as calibration source for combustion research: Temperatures and species concentrations of premixed H2/air flames
    • S. Prucker, W. Meier, and W. Stricker, A flat flame burner as calibration source for combustion research: Temperatures and species concentrations of premixed H2/air flames, Rev. Sci. Instrum. 65 (9), 1994.
    • (1994) Rev. Sci. Instrum , vol.65 , Issue.9
    • Prucker, S.1    Meier, W.2    Stricker, W.3
  • 45
    • 0000356813 scopus 로고
    • Sensitivity of quantitative vibrational Coherent Anti-Stokes Raman spectroscopy to saturation and Stark shift
    • M. Pealat, M. Lefebvre, J.-P. E. Taran, P.L. Kelley, Sensitivity of quantitative vibrational Coherent Anti-Stokes Raman spectroscopy to saturation and Stark shift. Phys. Rev. A, vol. 38, No 4, 1948-1965 (1988).
    • (1988) Phys. Rev. A , vol.38 , Issue.4 , pp. 1948-1965
    • Pealat, M.1    Lefebvre, M.2    Taran, J.-P.E.3    Kelley, P.L.4
  • 46
    • 84861386950 scopus 로고
    • Calculations of saturation line shapes and intensities in Coherent Anti-Stokes Raman scattering spectra of nitrogen
    • R.P. Lucht, R.L. Farrow, Calculations of saturation line shapes and intensities in Coherent Anti-Stokes Raman scattering spectra of nitrogen. JOSA B, v.5, n.6, 1243-1253 (1988).
    • (1988) JOSA B , vol.5 , Issue.6 , pp. 1243-1253
    • Lucht, R.P.1    Farrow, R.L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.