Packaged millimeter wave thermal MEMS switches

2001 31st European Microwave Conference, EuMC 2001

Volumn , Issue , 2001, Pages

  Blondy, P ^a   Mercier, D ^a   Cros, D ^a   Guillon, P ^a   Rey, P ^b   Charvet, P ^b   Diem, B ^b   Zanchi, C ^c   Lapierre, L ^c   Sombrin, J ^c   Quoirin, J B ^d  

^a UNIVERSITY OF LIMOGES   (France)

^b CEA LETI   (France)

^c CNES   (France)

^d STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MEMBRANES; FULL-WAVE SIMULATIONS; LONG TERM DURABILITY; METALLIC CONTACTS; MILLIMETER-WAVE SWITCH; RESISTIVE SWITCHES; SPRING CONSTANTS; WAFER-SCALE PACKAGING;

MILLIMETER WAVES;

EID: 84897551676     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.2001.339133     Document Type: Conference Paper

References (6)

1. C. Goldsmith, T. H. Lin, B. Powers, W. R. Wu, and B. Norwell, "Micromechanical membrane switches for microwave applications", IEEE MTT-S Digest, 1995, pp 91-94.
2. J. B. Muldavin, G. M. Rebeiz, "High isolation inductively tuned X band MEMS shunt switches", IEEE MTT-S Digest 2000, pp 169-172.
3. N. S. Barker, "Distributed MEMS Transmission lines", PhD dissertation, 1999, the University of Michigan.
4. S. Pacheco, L. P. B. Katehi, C. T. Nguyen, "Design of low actuation voltage RF Mems Switches", IEEE MTT-S Digest 2000, pp 165-168.
5. Z. Feng et al, "Design and modeling of RF MEMS tunable capacitors using electrothermal actuators", IEEE MTTS Digest 1999, pp 1507-1510
6. P. L. Charvet, B. Diem, M. Dufour, J. L. Morand, J. B. Quoirin, "Teta Switch: Micro Commutateur a declenchement pour application de puissance", EPF 2000, Lille, France, Nov. 2000.