On-chip microwave filters on standard silicon substrate incorporating a low-k BCB dielectric layer

2002 32nd European Microwave Conference, EuMC 2002

Volumn , Issue , 2002, Pages

  Leung, Lydia L W ^a   Chen, Kevin J ^a   Huo, Xiao ^a   Chan, Philip C H ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; MICROSTRIP LINES; MICROWAVE FILTERS;

BCB DIELECTRICS; BENZOCYCLOBUTENE; FULL WAVE ANALYSIS; INTERFACE LAYER; LOW K DIELECTRICS; MICROSTRIP TRANSMISSION LINES; SILICON SUBSTRATES; SIMULATIONS AND MEASUREMENTS;

INTERFACES (MATERIALS);

EID: 84897536329     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.2002.339215     Document Type: Conference Paper

References (10)

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