Wide band series switch fabricated using metal As sacrificial layer

2000 30th European Microwave Conference, EuMC 2000

Volumn , Issue , 2000, Pages

  Cai, Yongming ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CPW LINE; MECHANICAL STRUCTURES; METAL-TO-METAL CONTACT; SACRIFICIAL LAYER; SERIES SWITCHES; WIDE-BAND;

EID: 84897482748     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.2000.338637     Document Type: Conference Paper

References (3)

1. Elliott R. Brown, "RF-MEMS Switches for Reconfigurable Integrated Circuits", IEEE Trans. Microwave Theory Tech., Vol. 46, No. 11, Nov 1998, pp. 1868-1880.
2. J. J. Yao and M. F. Chang, "A surface micromachined miniature switch for telecommunications with signal frequencies from dc to 4 GHz"' in 8th Int. Conf Solid-State Sens. Actuators, Stockholm, Sweden, June 25, 1995, pp. 384-387.
3. S. Pacheco, C. T. Nguyen, and L. P. B. Katehi, "Micromechanical electrostatic k-band switches", in the IEEE MTT-S Int. Microwave Symp. Dig., Baltimore, MD, June 1998, pp. 1569-1572.