Controlling high-throughput manufacturing at the nano-scale

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8819, Issue , 2013, Pages

  Cooper, Khershed P ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

control; cyber; high throughput; large area; Nanomanufacturing; roll to roll

Indexed keywords

CYBER; HIGH-THROUGHPUT; LARGE AREA; NANO-MANUFACTURING; ROLL TO ROLL;

CONTROL; EMBEDDED SYSTEMS; INSTRUMENTS; MANUFACTURE; NANOIMPRINT LITHOGRAPHY; NANOSCIENCE; NANOSTRUCTURES; UNITS OF MEASUREMENT;

MODELS;

EID: 84896891190     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2026714     Document Type: Conference Paper

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