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Thin Solid Films

Volumn 553, Issue , 2014, Pages 26-29

Stannic oxide thin film growth via ion-beam-sputtering

(4) Becker, Martin a Hamann, Robert a Polity, Angelika a Meyer, Bruno K a

a JUSTUS LIEBIG UNIVERSITY (Germany)

Author keywords

Ion beam sputtering; Radio frequency ion thruster; Structural properties; Tin dioxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINITY; FILM GROWTH; ION PROPULSION; IONS; OXIDE FILMS; SAPPHIRE; SPUTTERING; STRUCTURAL PROPERTIES; SUBSTRATES; THIN FILMS; TIN DIOXIDE; TIN OXIDES;

ELECTRICAL RESISTANCES; ELECTROMAGNETIC SPECTRA; ION BEAM SPUTTERING METHODS; ION-BEAM SPUTTERING; MORPHOLOGICAL STUDY; OPTICAL TRANSPARENCY; RADIO FREQUENCY ION THRUSTERS; SUBSTRATE TEMPERATURE;

ION BEAMS;

EID: 84894904413 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.11.030 Document Type: Conference Paper

Times cited : (13)

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