Hydrogenation of silicon tetrachloride in microwave plasma

Chinese Journal of Chemical Engineering

Volumn 22, Issue 2, 2014, Pages 227-233

  Lu, Zhenxi ^a,b   Zhang, Weigang ^a  

^a INSTITUTE OF PROCESS ENGINEERING   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

equilibrium constant; hydrogenation; non thermodynamic equilibrium plasma; plasma temperature; silicon tetrachloride

Indexed keywords

EID: 84894546092     PISSN: 10049541     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1004-9541(14)60025-2     Document Type: Article

References (14)

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