Online predictive maintenance approach for semiconductor equipment

IECON Proceedings (Industrial Electronics Conference)

Volumn , Issue , 2013, Pages 3662-3667

  Luo, Ming ^a   Xu, Zhao ^b   Chan, Hian Leng ^a   Alavi, Marjan ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

fault prediction; kernel; predictive maintenance; recursive least square; semiconductor equipment

Indexed keywords

FAULT PREDICTION; KERNEL; PREDICTIVE MAINTENANCE; RECURSIVE LEAST SQUARE (RLS); SEMICONDUCTOR EQUIPMENT;

COMPUTATIONAL EFFICIENCY; FORECASTING; HEALTH; INDUSTRIAL ELECTRONICS; MAINTENANCE;

EQUIPMENT;

EID: 84893629194     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECON.2013.6699718     Document Type: Conference Paper

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