Three-dimensional lithography via digital holography

Frontiers in Optics, FIO 2012

Volumn , Issue , 2012, Pages

  Wang, P ^a   Menon, R ^a  

^a University of Utah   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL HOLOGRAPHY; LIGHT FIELDS; THREE DIMENSIONAL LITHOGRAPHY; THREE-DIMENSIONAL MICROSTRUCTURES;

COMPUTER GENERATED HOLOGRAPHY; PHOTORESISTS; THREE DIMENSIONAL;

LITHOGRAPHY;

EID: 84893065292     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. B. Kress, and P. Meyrueis, Digital Diffractive Optics: An Introduction to Planar Diffractive Optics and Related Technology (John Wiley, 2000).
2. G. Kim, J. A. Dominguez-Caballero, and R. Menon, "Design and analysis of multi-wavelength diffractive optics," Opt. Express 20 (2), 2814-2823 (2012).
3. H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud, and P. Vettiger, "SU-8: a low-cost negative resist for MEMS," J. Micromech. Microeng. 7, 121 (1997).
4. H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, "Active terahertz metamaterial devices," Nature 444, 597-600, (2006).