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Volumn 51, Issue , 2014, Pages 376-380
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Energy dependence on formation of TiO2 nanofilms by Ti ion implantation and annealing
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Author keywords
A. Oxides; A. Thin films; B. Crystal growth; D. Diffusion
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Indexed keywords
ACCELERATE VOLTAGE;
ANATASE TIO;
ANNEALING TEMPERATURES;
ENERGY DEPENDENCE;
ION ENERGIES;
OXYGEN ATMOSPHERE;
SUBSTRATE SURFACE;
TI ION IMPLANTATION;
NANO FILMS;
TIO;
ANNEALING;
ION IMPLANTATION;
OXIDE MINERALS;
TITANIUM DIOXIDE;
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EID: 84892777995
PISSN: 00255408
EISSN: None
Source Type: Journal
DOI: 10.1016/j.materresbull.2013.12.040 Document Type: Article |
Times cited : (6)
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References (25)
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