A facile, standardized fabrication approach and scalable architecture for a micro gas chromatography system with integrated pump

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 2755-2758

  Qin, Y ^a   Gianchandani, Y B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Knudsen pump; Micro gas chromatography; microplasma emission; pulsed discharge; stackable architecture

Indexed keywords

KNUDSEN PUMP; LITHOGRAPHIC PROCESS; MICRO-GAS CHROMATOGRAPHY; MICRO-PLASMAS; PULSED DISCHARGE; SCALABLE ARCHITECTURES; SEPARATION COLUMN; SYSTEM INTEGRATION;

ACTUATORS; ARCHITECTURE; MICROSYSTEMS; SOLID-STATE SENSORS; VACUUM PUMPS;

GAS CHROMATOGRAPHY;

EID: 84891672580     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627376     Document Type: Conference Paper

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