Normal Incidence Reflectometry of Concave Multilayer Mirrors Using Synchrotron Radiation to Evaluate the Period Thickness Distribution

AIP Conference Proceedings

Volumn 705, Issue , 2004, Pages 839-842

  Hatano, Tadashi ^a   Kubota, Shogo ^a   Adachi, Yasunobu ^a   Tsuru, Toshihide ^a   Yamamoto, Masaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84891334779     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1757926     Document Type: Conference Paper

References (6)

1. Mitani, S., Namioka, T., Yanagihara, M., Yamashita, K., Fujita, J., Morita, S., Harada, T., Sasaki, T., Sato, S., Miyahara, T., Koide, T., Mikuni, A., Okamoto, W., and Maezawa, H., Rev. Sci. Instrum. 60, 2216-2218 (1989).
2. Hatano, T., Umetsu, H., and Yamamoto, M., Precision Science and Technology for Perfect Surfaces, JSPE Publication Series No. 3, JSPE, Tokyo, 1999, pp. 292-297.
3. Hatano, T., Kubota, S., and Yamamoto, M., "Layer by Layer Lateral Thickness Control in Multilayer Fabrication" in International Symposium on Technology and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources, Symposium Proceedings, P-26.
4. Harada, T., Sekiyama, K., Hatano, T., and Yamamoto, M., "Design of a triangular path interferometer for EUV imaging optics" in International Symposium on Technology and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources, Symposium Proceedings, O-09.
5. Montcalm, C., Spiller, E., Weber, F. J., Wedowski, M., Folta, J. A., and Gullikson, E. M., J. Vac. Sci. Technol. B 19, 1219-1228 (2001).
6. Henke, B. L., Gullikson, E. M., and Davis, J. C., Atomic data and Nuclear Data Tables 54, 181-342 (1993), http://wwwcxro. lbl. gov/optical-constants/.