Effect of mask grid on SOI arrayed waveguide grating performance

IEEE International Conference on Group IV Photonics GFP

Volumn , Issue , 2013, Pages 31-32

  Pathak, S ^a   Vanslembrouck, M ^b   Dumon, P ^b   Van Thourhout, D ^b   Bogaerts, W ^b  

^a GHENT UNIVERSITY   (Belgium)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY MASKS;

ARRAYED WAVEGUIDE GRATINGS;

PHOTONICS;

EID: 84891044382     PISSN: 19492081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Group4.2013.6644475     Document Type: Conference Paper

References (8)

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