Improving SEM inspection performance in semiconductor manufacturing industry

Human Factors and Ergonomics In Manufacturing

Volumn 24, Issue 1, 2014, Pages 124-129

  Lin, Chih Long ^a   Chen, Fu Sheng ^b   Twu, Li Jen ^b   Wang, Mao Jiun J ^b  

^a NATIONAL TAIWAN UNIVERSITY OF ARTS   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Eye fatigue; Inspection performance; Scanning electron microscope (SEM); Semiconductor industry

Indexed keywords

EYE FATIGUE; LCD MONITORS; LIQUID CRYSTAL DISPLAY(LCD); SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING INDUSTRY; VISUAL FATIGUE; WAFER MANUFACTURING;

COATINGS; GOLD; GOLD COATINGS; INSPECTION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE;

LIQUID CRYSTAL DISPLAYS;

EID: 84890976948     PISSN: 10908471     EISSN: 15206564     Source Type: Journal    
DOI: 10.1002/hfm.20360     Document Type: Article

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