189-nm wavelength generation with borate crystals

CLEO: Science and Innovations, CLEO_SI 2012

Volumn , Issue , 2012, Pages

  Qu, C ^a,b   Yoshimura, M ^a,b   Tsunoda, J ^a,b   Kaneda, Y ^a,b,c   Imade, M ^a   Sasaki, T ^a,b   Mori, Y ^a,b  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORATE CRYSTALS; PHASE MATCHING PROPERTIES; VACUUM ULTRAVIOLET LIGHT;

PHASE MATCHING;

EID: 84890699816     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1364/cleo_si.2012.cf3a.4     Document Type: Conference Paper

References (7)

1. S. Imai, K. Matsuki, N. Kikuiri, K. Takayama, O. Iwase, Y. Urata, T. Shinozaki, Y. Wada, and S. Wada, "Highly reliable 198 nm light source for semiconductor inspection based on dual fiber lasers", Proc. of SPIE Vol. 7580 75800H (2010).
2. B. C. Wu, F. L. Xie, C.T. Chen, D. Q. Deng, and Z. Y. Xu, "Generation of tunable coherent vacuum ultraviolet radiation in LiB3O5 crystal", Opt. Commun. Vol. 88, pp. 451-454 (1992).
3. K. Kato, "Tunable UV generation to 0.185 μm in CsB3O5", IEEE J. Quantum Electron., Vol. 31, pp. 169-171 (1995).
4. N. Umemura and K. Kato, "Ultraviolet generation tunable to 0.185 μm in CsLiB6O10", Appl. Opt., Vol. 36, pp. 6794-6796 (1997).
5. K. Kato, "Tunable UV generation to 0.2325 μm in LiB3O5", IEEE J. Quantum Eletron., Vol. 26, pp. 1173-1175 (1990).
6. Y. Kagebayashi, Ph.D. Eng. Thesis, Osaka University, March 2001 (in Japanese, unpublished).
7. H. Shimatani, M. Eng. Thesis, Osaka University, March 2009 (in Japanese, unpublished).